Work

A piezo-capacitive BAW accelerometer with extended dynamic range using a gap-changing moving electrode

Year: 2018

Type: conference-paper

Source: IEEE/ION Position Location and Navigation Symposium

DOI: 10.1109/plans.2018.8373392

Authors: Anosh Daruwalla, Haoran Wen, Chang-Shun Liu, Hoon Jeong, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2805219221

FWCI: 3.836

Cites: 13

Cited by: 9

Related to: 10