MEMS Fabry–Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism
Work
Year: 2018
Type: article
Institutions Robert Bosch (Germany), Karlsruhe Institute of Technology
Cites: 32
Cited by: 4
Related to: 10
FWCI: 0.29
Citation percentile (by year/subfield): 43.38
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed