Work

Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

Year: 2018

Type: article

Abstract: A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.

Source: Nanoscale

DOI: 10.1039/c8nr04665d

Authors: Ewelina Wajs, Girish Rughoobur, Andrew J. Flewitt

Institutions: University of Cambridge, Massachusetts Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $1,242

Funders: Cancer Research UK, Cambridge Trust, Universidad Politécnica de Madrid