Work

Effect of beam profile on nanosecond laser drilling of 4H-SIC

Year: 2018

Type: article

Source: Journal of Laser Applications

DOI: 10.2351/1.5040597

Authors: Byunggi Kim, Ryoichi Iida, Syunya Kiyokawa, Kazuyoshi Fushinobu

Institution: Tokyo Institute of Technology

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2885889857

FWCI: 0.736

Cites: 48

Cited by: 22

Related to: 10