Fabrication and Characteristics of Spin-on Dielectric for Multi-level Interconnect in WLP
Year: 2018
Type: conference-paper
Authors: Changmin Song, Sungdong Kim, Sarah Kim
Institution: Seoul National University of Science and Technology
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2887559584