Work

CVD of aluminium nitrides for high temperature applications

Year: 2015

Type: conference-paper

Source: HAL

Authors: Pons, Michel, Boichot, Raphael, Mercier, Frederic, Blanquet, Elisabeth

Institution: Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2889626577

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Related to: 10