Work

On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon

Year: 2018

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2018.09.030

Authors: Luis A. Marqués, María Aboy, Iván Santos, Pedro López, Fuccio Cristiano, Antonino La Magna, Karim Huet, Toshiyuki Tabata, Lourdes Pelaz

Institutions: Universidad de Valladolid, Centre National de la Recherche Scientifique, Laboratoire d'Analyse et d'Architecture des Systèmes, Université de Toulouse, Institute for Microelectronics and Microsystems, Laser Systems & Solutions of Europe (France)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: European Commission, Federación Española de Enfermedades Raras, Ministerio de Ciencia e Innovación, Consejería de Educación, Junta de Castilla y León

Awards: G751679180, G8817682152

OpenAlex ID: W2893450265

FWCI: 0.552

Cites: 22

Cited by: 4

Related to: 10