Work

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

Year: 2018

Type: article

Abstract: Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam's movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.

Source: Beilstein Journal of Nanotechnology

DOI: 10.3762/bjnano.9.240

Authors: Lukas Keller, Michael Huth

Institution: Goethe University Frankfurt

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

Funder: Deutsche Forschungsgemeinschaft

Award: G446700950