Work

Fabrication of sub-20 nm patterns using dopamine chemistry in self-aligned double patterning

Year: 2018

Type: article

Source: Nanoscale

DOI: 10.1039/c8nr04040k

Authors: Yinyong Li, Jaewon Choi, Zhiwei Sun, Thomas P. Russell, Kenneth R. Carter

Institution: University of Massachusetts Amherst

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Center for Hierarchical Manufacturing, National Science Foundation, Samsung, Division of Materials Research

OpenAlex ID: W2896346909

FWCI: 0.549

Cites: 46

Cited by: 15

Related to: 10