Work

Facilities for VLSI Circuit Fabrication

Year: 1985

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-0-12-234100-7.50013-7

Author: KIRBY G. VOSBURGH

Institution: General Electric (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2896467843

FWCI:

Cites: 2

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Related to: 10