Work

Application of dynamic maskless holographic lithography

Year: 2007

Type: conference-paper

Source: International Congress on Applications of Lasers & Electro-Optics (ICALEO)

DOI: 10.2351/1.5061165

Authors: Nathan J. Jenness, Daniel G. Cole, Robert L. Clark

Institutions: University of Pittsburgh, Duke University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2897623920

FWCI:

Cites: 9

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Related to: 10