Work

沉积参量及时效时间对SiO2薄膜残余应力的影响

Year: 2005

Type: article

Source: Shanghai Institute of Optics and Fine Mechanics, CAS Institutional Repository

Authors: 邵淑英, 田光磊, 范正修, 邵建达

Language: 中文

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2898862147

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