Work

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Year: 2004

Type: article

Source: TechConnect Briefs

Authors: P Shing Ho, Lawrence Musson, Steven J. Plimpton, Rodney C. Schmidt

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2899853632

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Related to: 10