Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect
Year: 2018
Type: conference-paper
Authors: Ji Yeon Hyun, Se Jin Park, Soohyun Bae, HyunJung Park, Dongkyun Kang, Seung Hoon Lee, Hae-Seok Lee, Yoonmook Kang, Donghwan Kim
Institution: Korea University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2903290145
