Work

Combined Effects of Supersaturation and Stress for the Control of AlN Film Quality

Year: 2017

Type: conference-paper

Source: HAL

Authors: Boichot, Raphael, Chen, Danying, Mercier, Frederic, Chubarov, Mikhail, Blanquet, Elisabeth, Pons, Michel, Gusti, Gael

Institution: Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2910643557

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Related to: 10