Nano-Subsidence-Assisted Precise Integration of Patterned Two-Dimensional Materials for High-Performance Photodetector Arrays
Year: 2019
Type: article
Abstract: substrates represents an attractive, low-cost system-on-chip strategy toward the realization of extended functions in silicon microelectronics. However, the reliable integration of such atomically thin arrays on planar patterned surfaces has proven challenging due to their poor adhesion to underlying substrates, as ruled by weak van der Waals interactions. Here, we report on an integration method utilizing the flexibility of the atomically thin crystals and their physical subsidence in liquids, which enables the reliable fabrication of the micropatterned 2D materials/Si arrays. Our photodiode devices display peak sensitivity as high as 0.35 A/W and external quantum efficiency (EQE) of ∼90%. The nano-subsidence technique represents a viable path to on-chip integration of 2D crystals onto silicon for advanced microelectronics.
Source: ACS Nano
Institutions: Centre National de la Recherche Scientifique, Institut de Science et d'Ingénierie Supramoléculaires, Université de Strasbourg, Chinese Academy of Sciences, Beijing National Laboratory for Molecular Sciences, Institute of Chemistry, Nanjing University, Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructures
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
Funders: Centre International de Recherche aux Frontières de la Chimie, Graphene Flagship, European Commission, Agence Nationale de la Recherche, National Natural Science Foundation of China, Ministry of Science and Technology of the People's Republic of China, China Scholarship Council, H2020 Future and Emerging Technologies, H2020 Marie Skłodowska-Curie Actions, FP7 Information and Communication Technologies
Awards: G1206597813, Graphene-based disruptive technologies, bottom-UP blueprinting GRAphene baseD Electronics, MULTIfunctional optoelectronic devices based on hybrid heterostructures of 2D materials and photochromic SWITCHes, MULTIfunctional optoelectronic devices based on hybrid heterostructures of 2D materials and photochromic SWITCHes, G2440768094, G2646095492, G2692038005, G3188687615, Center of Chemistry of Complex System, G4873647100, G6096795348, G7240651115, G7376787254, G7830248607, G783677704, Nanostructures en Interaction avec leur Environnement
OpenAlex ID: W2912982023