Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage
Work
Year: 2019
Type: article
Abstract: A multibody dynamic model is developed for dynamic analysis of a 5‐DOF flexure‐based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5‐DOF st... more
Authors Yiping Shen, Xin Luo, Songlai Wang, Xuejun Li
Institutions Hunan University of Science and Technology, Huazhong University of Science and Technology
Cites: 40
Cited by: 3
Related to: 10
FWCI: 0.135
Citation percentile (by year/subfield): 60.32
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
APC paid (est): $2,400
Grant ID 11572125