Year: 2014
Type: conference-paper
Abstract: This paper reports on a novel temperature-compensated single-crystal silicon resonator that has a quadratic temperature characteristic with a high turn-over temperature.An energytrapped resonance mode is synthesized from acoustic coupling of evanescent and propagating phonons with opposite temperature sensitivity trends in a <100>-aligned engineered waveguide (phonon trap).A 77MHz device implemented in AlN-on-silicon platform shows a Q of 13,000 and a turn-over temperature of 87°C facilitating implementation of an oven-controlled frequency reference.An oscillator implemented using this device, while selfovenized by a DC current passing through its body, exhibits a consistent phase-noise of -106 dBc/Hz at 1kHz offset from carrier.
Authors: R. Tabrizian, A. Norouzpour-Shirazi, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Award: G1635955495
OpenAlex ID: W2929258598