Year: 2016
Type: conference-paper
Abstract: This paper introduces the design, fabrication and initial testing of a smart MEMS-based micro thermal pre-concentration (μTPC) system with integrated mass-sensitive chemical sensors for volatile organic compound (VOC) sensing.The presented suspendedmembrane μTPC design features a hybrid of a high surface-area-tovolume ratio and a low thermal mass, resulting in a potentially high pre-concentration factor and a short thermal time constant.Additionally, the system co-integrates upstream and downstream resonant cantilever sensors, operated in an in-plane resonant mode, to monitor the VOC uptake into the μTPC in real time, but also offering the possibility of a fully integrated chemical sensing system with a dead volume of <10μL.
Authors: C. Carron, P. Getz, M. Navaei, G. McMurray, O. Brand
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2931527303