Work

Cantilever-based Resonant Microsensor With Integrated Temperature Modulation

Year: 2014
Type: conference-paper
Abstract: This paper introduces a resonant cantilever platform with integrated temperature modulation for chemical sensing.The embedded heating elements enable rapid thermal cycling of individual resonant microstructures and, thus, allow for analysis of signal transients, which contain information about the sorption kinetics of analytes into the sensing film on the resonator surface.The signal transients are generated without the need for a microfluidic setup to switch between analyte and reference gas streams.Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination and quantification.
Language: English
Open Access status: bronze
OpenAlex ID: W2932063523
FWCI:
Cites: 11
Cited by:
Related to: 10