Year: 2008
Type: conference-paper
Abstract: This paper presents Micro Resonant Devices (MRD's) which are visible in MRI scans.These LC resonators are fabricated using electroplated spiral inductors combined with thin-film Ta 2 O 5 capacitors, formed by a novel oxy-nitride plasma oxidation process.Arrays of resonators were fabricated with diameters of 0.3, 0.5 and 1 mm.To compensate for process variations, resonators were fabricated with parametrically varying capacitor areas.In this study, we characterize the first such devices for their detectability as a function of size, in saltcontaining aqueous media and in vivo, using a clinical MRI scanner and a scanning UHF microscope.
Institutions: Draper Laboratory, Beth Israel Deaconess Medical Center
Language: English
Topic: RFID technology advancements
Subfield: Media Technology
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Award: G1473990100
OpenAlex ID: W2934213947