Year: 2012
Type: conference-paper
Abstract: This paper reports, for the first time, on a versatile low-loss filter technology that can cover a wide frequency range (30 MHz to 3 GHz) and has electronic bandwidth and frequency tunability.The reconfigurable MEMS filters implemented using this technology have lithographically-defined frequencies, and use high-Q, low-motional-resistance silicon bulk acoustic resonators (SiBARs) with sidewall aluminum nitride (AlN) signal transduction.A proof-of-concept one-stage ladder filter at ~100 MHz implemented using this technology shows an insertion loss (IL) of ~5 dB (with 50 termination) and a tunable bandwidth ranging between 110-360 kHz.An array of two adjacent channelselect filters with different bandwidths is also demonstrated.
Authors: R. Tabrizian, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2934556146