Fabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devices
Year: 2019
Type: article
Abstract: This work demonstrates and discusses the fabrication of cross-plane configured micro thermoelectric devices for the power generation and thermal management of the photonic devices. The device is fabricated using a cost-effective electrodeposition technique on the silicon wafer with 210 pairs of the electrodeposited p-type BiTe and n-type CuTe pillars. The complete device is fabricated using the flip-chip bonding technique. Our focus in this work is on the challenges in the device fabrication and the solutions employed to overcome the obstacles thereby successfully fabricating the micro thermoelectric device.
Institutions: University College Cork, Tyndall National Institute
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
Awards: Smart Autonomous Multi Modal Sensors for Vital Signs Monitoring, Thermally Integrated Smart Photonics Systems, Thermoelectric efficiency of IV-VI and V2-VI3 materials driven near phase transitions, G3107166165, G434337789, Smart Autonomous Multi Modal Sensors for Vital Signs Monitoring, G6586979110, CONNECT: The Centre for Future Networks & Communications, Thermally Integrated Smart Photonics Systems, G8173526563
OpenAlex ID: W2938927635
