Work

Large-Displacement Vertical Electrostatic Microactuator Dynamics Using Duty-Cycled Softening/Stiffening Parametric Resonance

Year: 2019

Type: article

Abstract: Electrostatic microactuators with large vertical scanning range (several hundred micrometers) at high frequency (hundreds to thousands of hertz) and chips' sizes compatible with endoscopic microscopy have recently been demonstrated based on parametric resonance. This paper examines the use and modeling of mixed softening/hardening dynamics to help produce large ranges of motion in this class of mirrors. Origin of spring stiffening behavior in actuator design is described, followed by non-dimensional analysis of actuator motion trends. The experimental results are presented for a sample actuator design with up to 480-μm displacement at 1225 Hz and 60 V. Comparison of predicted trends and comments on benefits and limitations of modeling are provided.

Source: Journal of Microelectromechanical Systems

Authors: Haijun Li, Paul Barnes, Eric Harding, Xiyu Duan, Thomas D. Wang, Kenn R. Oldham

Institutions: University of Michigan, Michigan Medicine

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: National Science Foundation, National Institutes of Health, National Institute of Biomedical Imaging and Bioengineering

Awards: Robust Design and Control of Multi-Axis Thin-film Piezoelectric Scanning Actuators for Deep-Tissue Endoscopic Microscopy, G8302725833, G9000026168

OpenAlex ID: W2940866222

FWCI: 0.792

Cites: 37

Cited by: 14

Related to: 10