ChemInform Abstract: REPEATED REMOVAL OF THIN LAYERS OF SILICON BY ANODIC OXIDATION
Year: 1976
Type: article
Source: ChemInform
Authors: H. D. BARBER, H. B. LO, J. E. JONES
Language: German
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2950799382
