ChemInform Abstract: OXIDATION, IMPURITY DIFFUSION, AND DEFECT GROWTH IN SILICON ‐ AN OVERVIEW
Year: 1981
Type: article
Source: ChemInform
Author: R. B. FAIR
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2952452606
