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ChemInform Abstract: OXIDATION, IMPURITY DIFFUSION, AND DEFECT GROWTH IN SILICON ‐ AN OVERVIEW

Year: 1981
Type: article
Source: ChemInform
Author: R. B. FAIR
Language: English
Open Access status: closed
OpenAlex ID: W2952452606
FWCI:
Cites: 1
Cited by:
Related to: 10