Controlling the threshold voltage of β-Ga 2 O 3 field-effect transistors via remote fluorine plasma treatment
Year: 2019
Type: article
Source: Journal of Materials Chemistry C
DOI: 10.1039/c9tc02468a
Institutions: Korea University, United States Naval Research Laboratory
Language: English
Topic: Ga2O3 and related materials
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G4369048575, G4902162394
OpenAlex ID: W2952585453
