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ChemInform Abstract: A QUANTITATIVE MODEL FOR THE DIFFUSION OF PHOSPHORUS IN SILICON AND THE EMITTER DIP EFFECT

Year: 1977

Type: article

Source: ChemInform

DOI: 10.1002/chin.197743007

Authors: R. B. FAIR, J. C. C. TSAI

Institution: AT&T (United States)

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2953255289

FWCI:

Cites: 1

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Related to: 10