Work

Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)

Year: 2001

Type: article

Source: TechConnect Briefs

Authors: James Castracane, J. van Eisden, Stephen Craig Olson, Bijun Xu, Yuhan Yao

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2956087627

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