Work

Self-Rolled Multilayer Metasurfaces

Year: 2019

Type: article

Abstract: Multilayer metasurfaces (MLMs) represent a versatile type of three-dimensional optical metamaterials that could enable ultrathin and multifunctional photonic components. Herein, we demonstrate an approach to readily fabricate MLMs, exploiting a thin film self-rolling technique. As opposed to standard layer-by-layer approaches, all the metasurfaces are defined within a single nanopatterning step, significantly reducing fabrication time and costs. We realize two MLM platforms relying on widely used nanopatterning techniques, namely, focused ion-beam and electron-beam lithographies. A first example are MLMs comprised of nanohole patterns structured into metal–dielectric seed bilayers. The second platform is comprised of vertical stacks of angled plasmonic nanorod arrays separated by thin dielectric layers. Such angled MLMs exhibit a selective response to circularly polarized light, in agreement with previous works relying on layer-by-layer processes. Our approach can pave the way for the efficient prototyping of novel MLMs, such as devices with varying numbers of layers and configurations that can be fabricated on a single chip.

Source: ACS Photonics

DOI: 10.1021/acsphotonics.9b00816

Authors: Esteban Bermúdez-Ureña, Ullrich Steiner

Institution: University of Fribourg

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $5,000

Funders: Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung, Adolphe Merkle Foundation, Staatssekretariat für Bildung, Forschung und Innovation, H2020 Marie Skłodowska-Curie Actions