Work

Study of TaN and TaN-Ta-TaN thin films as diffusion barriers in CeFe4Sb12 skutterudite

Year: 2019
Type: article
Abstract: The efficiency of thermoelectric devices depends on phase stability of layers constituting the device. TaN and TaN-Ta-TaN thin films, 900 nm thick, were investigated as diffusion barriers for the CeFe4Sb12 thermoelectric substrate in contact with the Cu electrode. It is shown that Sb diffuses through the TaN layer when the sample is heated above 400 °C. Multilayer TaN-Ta-TaN acts as the diffusion barrier for Sb and is efficient up to 500 °C. When diffusion of Sb occurs above 400 °C for TaN and above 500 °C for TaN-Ta-TaN, the formation of FeSb2 and Cu2Sb precipitates was identified by XRD and TEM/energy dispersive X-ray spectroscopy.
Language: English
Open Access status: bronze
OpenAlex ID: W2975407075
FWCI: 0.594
Cites: 48
Cited by: 8
Related to: 10