Work

Improving Structural Strength and Stability of Parylene-Based Capacitive Micro Pressure Sensor Using Corrugated Sidewall

Year: 2019

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2019.8870736

Authors: Tae-Bong Hur, William W. Clark, Youngjae Chun, Catherine Go, Bryan Tillman, Sung Kwon Cho

Institutions: University of Pittsburgh, University of Pittsburgh Medical Center, McGowan Institute for Regenerative Medicine

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2981225721

FWCI:

Cites: 6

Cited by: 2

Related to: 10