Work

Design and fabrication of an InP-based moving waveguide 1/spl times/2 optical MEMS switch

Year: 2003

Type: conference-paper

Source: International Semiconductor Device Research Symposium

Authors: Marcel W. Pruessner, Daniel P. Kelly, M. Datta, Hyunji Lim, Roya Maboudian, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2983387725

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