Work

Study on a High Performance MEMS Infrared Thermopile Detector

Year: 2019

Type: article

Abstract: This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.

Source: Micromachines

DOI: 10.3390/mi10120877

Authors: Aida Bao, Cheng Lei, Haiyang Mao, Ruirui Li, Yihao Guan

Institutions: Beijing Institute of Technology, North University of China, Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,418

Funders: National Natural Science Foundation of China, Natural Science Foundation of Jiangsu Province