High temperature (300 °C) ALD grown Al2O3 on hydrogen terminated diamond: Band offset and electrical properties of the MOSFETs
Year: 2020
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.5126359
Institution: Xidian University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G2577657488, G4237519315, G8150279066
OpenAlex ID: W2997609917
