Work

A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process

Year: 2019

Type: conference-paper

Source: Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...

DOI: 10.1109/sensors43011.2019.8956601

Authors: Seungyong Shin, Haoran Wen, Hyun-Keun Kwon, Gabrielle D. Vukasin, Thomas W. Kenny, Farrokh Ayazi

Institutions: Georgia Institute of Technology, Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2999879216

FWCI: 2.785

Cites: 13

Cited by: 15

Related to: 10