Work

Position observer based galvanometer scanner and XY stage synchronization for large area processing

Year: 2020

Type: conference-paper

Source: Laser applications in microelectronic and optoelectronic manufacturing. Conference

DOI: 10.1117/12.2546482

Authors: Keith J. Dowling, Bhavesh A. Bhut, Mark S. Lucas, Seethram Sivam, Yu John Hsu, Amit Shahar, Jin Li

Institution: Novanta (United States)

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3010122578

FWCI:

Cites:

Cited by: 3

Related to: 10