Work

In Situ Scanning Electron Microscopy of HMDS Converted to NH3 and Methyl Silanol

Year: 2020

Type: article

Source: Silicon

DOI: 10.1007/s12633-020-00473-7

Author: Arzu Erol

Institution: Zonguldak Bülent Ecevit University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3013293580

FWCI:

Cites: 1

Cited by: 1

Related to: 10