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MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane

Year: 2020

Type: conference-paper

Source: Proceedings, IEEE micro electro mechanical systems

DOI: 10.1109/mems46641.2020.9056313

Authors: Yongkui Tang, Song Liu, Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3015927226

FWCI: 3.638

Cites: 9

Cited by: 8

Related to: 10