Work

A Hermetically-Sealed 2.9MHz $\mathrm{N}=3$ Disk BAW Gyroscope with Sub-Degree-Per-Hour Bias Instability

Year: 2020

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems46641.2020.9056407

Authors: Haoran Wen, Anosh Daruwalla, Chang-Shun Liu, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3016116202

FWCI: 5.445

Cites: 2

Cited by: 16

Related to: 10