Work

Capacitive Lamé Mode Resonators in $65\ \mu \mathrm{m}$-Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million

Year: 2020

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems46641.2020.9056301

Authors: Jeremy Yang, Benoit Hamelin, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3016237718

FWCI: 3.176

Cites: 8

Cited by: 9

Related to: 10