Atomic layer deposition
Year: 2002
Type: book-chapter
Source: Elsevier eBooks
Parent work: Handbook of Thin Films
Authors: Mikko Ritala, Markku Leskelä
Institution: University of Helsinki
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3016972814