Year: 2018
Type: dissertation
Abstract: For imaging nano-scaled samples, atomic force microscopy (AFM) and scanning electron microscopy (SEM) are two complementary techniques that have become indispensable in nano research. A hybrid SEM-AFM instrument can enable in-situ complementary imaging, fast sample navigation down to nanometer scale, SEM-guided nanoindentation, live monitoring of AFM tip condition, and visually guided nanomanipulation. A closed-loop operated AFM system was developed for use within an SEM, which would significantly benefit nano-structure and nano-materials research. Electron irradiation from SEM induces significant fluctuations in the AFM force sensor readout, which compromises the AFM functionality. To enable truly simultaneous SEM-AFM imaging, an active drift reduction method was proposed to overcome this problem, which is based on the junction field-effect transistor (JFET) model of the piezoresistive AFM cantilever. The experiment results showed that the proposed method was effective, reducing the drift by about 2000 times down to
Source: TSpace (University of Toronto)
Author: Jun Chen
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W3021974160