An Inkjet Printing Technique for Scalable Microfabrication of Graphene-Based Sensor Components
Year: 2020
Type: article
Abstract: This paper presents a versatile and precise graphene patterning technique using the combined process of masking and inkjet printing. A graphene-based structure is fabricated by first defining the structural pattern and position using a masking mold, which can be either electroplated copper or deep reactive ion etching (DRIE) silicon shadow mask, followed by inkjet deposition of graphene ink and lift-off. The hybrid technique can realize high-fidelity, high-resolution graphene-based microstructures including free-standing and cantilever beams, four-point resistive measurement structures, and piezoresistive sensing elements with a minimum line width of $\sim 20~\mu \text{m}$ . Moreover, this method can facilitate the micropatterning of graphene oxide (GO) and reduced graphene oxide (rGO) on substrates such as polydimethylsiloxane (PDMS) and SiO2/Si for selective cell culturing applications. Owing to the characteristics of low chemical usage, low process temperature and complexity, and high flexibility and fault tolerance of inkjet printing, this technique demonstrates compelling potential for a variety of biomedical applications.
Source: IEEE Access
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,750
Awards: Novel Bioengineering and Technological Approaches to Solve Three Major Health Problems in Taiwan( Iv ), G2922171469, G298583090, Development of Intelligent Adaptive Deep Brain Stimulation System with Abnormal Brain Potential Signal Detection, Lego Semiconductor Core Technology for Intelligent Electronics Platform( Iv ), Development of a Flexible Neural Network with Multimodal Sensing Capability Platform Technology for Neural Signal Transduction Investigation.
OpenAlex ID: W3023288222