Work

Reclaiming copper/low-k control wafers during development of 0.13- and 0.10-μm devices

Year: 2002

Type: article

Authors: Edit Braunstein, Daniele M. Gilkes, Steven Lippy, Stephen A. Reid, R.O. Adebanjo

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3025487665

FWCI: 0.478

Cites:

Cited by: 8

Related to: 5