Work

The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma

Year: 2013

Type: article

Authors: 김은애, 이헌수, 이윤성, 장홍영

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3026436696

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Related to: 20