Work

The chemistry of Si3N4 and Si deposition studied using molecular beam techniques

Year: 1992

Type: article

Source: Egyptian Computer Science Journal

Authors: Richard J. Buss, P Shing Ho, W.G. Breiland

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3026644876

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