Work

Analysis of semiconductor structures by nuclear and electrical techniques. Interim technical report. [Sputter deposition of Ti--W mixed films on Si]

Year: 1977

Type: article

Source: OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

Authors: Joel M. Harris, S. S. Lau, Jacek Mayer, Nicolet, J. O. Olowolafe

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W303454552

FWCI:

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