Cascade optical coherence tomography (C-OCT)
Year: 2020
Type: article
Abstract: Significant advances for optical systems in terms of both performance and packaging are enabled by freeform optical components. Yet, surface form metrology for freeform optics remains a challenge. We developed and investigated a point-cloud cascade optical coherence tomography (C-OCT) technique to address this metrology challenge. The mathematical framework for the working principle of C-OCT is presented. A novel detection scheme is developed to enable high-speed measurements. Experimental results validate the C-OCT technique with the prototype setup demonstrating single-point precision of ±26 nm (∼λ/24 at the He-Ne wavelength), paving the way towards full surface measurements on freeform optical components.
Source: Optics Express
DOI: 10.1364/oe.394638
Institution: University of Rochester
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
Funder: National Science Foundation
OpenAlex ID: W3034683698
