Work

Development of vapor deposited thin films for bio-microsystems

Year: 2002

Type: dissertation

Abstract: Development of vapor deposited thin films for bio-microsystems.

Source: Figshare

Author: Ketul C. Popat

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W3035550247

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